@misc{indiciae9768e31a5a59,
  title = {Graphene MEMS and NEMS},
  author = {Xuge Fan and Chang He and Jie Ding and Qiang Gao and Hongliang Ma and Max C. Lemme and Wendong Zhang},
  year = {2024},
  url = {https://arxiv.org/abs/2410.01439},
  note = {Source identifier: 2410.01439}
}