@misc{indiciae51b6d9bf6c57,
  title = {Thickness dependence of the mechanical properties of piezoelectric high-\$Q\_m\$ nanomechanical resonators made from aluminium nitride},
  author = {Anastasiia Ciers and Alexander Jung and Joachim Ciers and Laurentius Radit Nindito and Hannes Pfeifer and Armin Dadgar and Jürgen Bläsing and André Strittmatter and Witlef Wieczorek},
  year = {2025},
  doi = {10.1088/2633-4356/ad9b64},
  url = {https://arxiv.org/abs/2410.03944},
  note = {Source identifier: 2410.03944}
}