TY  - RPRT
TI  - Thickness dependence of the mechanical properties of piezoelectric high-$Q_m$ nanomechanical resonators made from aluminium nitride
AU  - Anastasiia Ciers
AU  - Alexander Jung
AU  - Joachim Ciers
AU  - Laurentius Radit Nindito
AU  - Hannes Pfeifer
AU  - Armin Dadgar
AU  - Jürgen Bläsing
AU  - André Strittmatter
AU  - Witlef Wieczorek
PY  - 2025
DO  - 10.1088/2633-4356/ad9b64
UR  - https://arxiv.org/abs/2410.03944
ID  - 2410.03944
ER  -