@misc{indiciaeb28594dbc3ee,
  title = {Control of Cu morphology on TaN barrier and combined Ru-TaN barrier/liner substrates for nanoscale interconnects from atomistic kinetic Monte Carlo simulations},
  author = {Samuel Aldana and Cara-Lena Nies and Michael Nolan},
  year = {2024},
  doi = {10.1039/d4nr04505j},
  url = {https://arxiv.org/abs/2410.06133},
  note = {Source identifier: 2410.06133}
}