TY  - RPRT
TI  - Control of Cu morphology on TaN barrier and combined Ru-TaN barrier/liner substrates for nanoscale interconnects from atomistic kinetic Monte Carlo simulations
AU  - Samuel Aldana
AU  - Cara-Lena Nies
AU  - Michael Nolan
PY  - 2024
DO  - 10.1039/d4nr04505j
UR  - https://arxiv.org/abs/2410.06133
ID  - 2410.06133
ER  -