@misc{indiciaeb5434a2702ac, title = {Ion-Assisted Nanoscale Material Engineering in Atomic Layers}, author = {Hossein Taghinejad and Mohammad Taghinejad and Sajjad Abdollahramezani and Qitong Li and Eric V. Woods and Mengkun Tian and Ali A. Eftekhar and Yuanqi Lyu and Xiang Zhang and Pulickel M. Ajayan and Wenshan Cai and Mark L. Brongersma and James G. Analytis and Ali Adibi}, year = {2024}, url = {https://arxiv.org/abs/2410.06181}, note = {Source identifier: 2410.06181} }