@misc{indiciaed8b7394af7a9,
  title = {Surface Structuring of Patterned 4H-SiC Surfaces Using a SiC/Si/SiC Sandwich Approach},
  author = {Yann Jousseaume and Piyush Kumar and Marianne Etzelmüller Bathen and François Cauwet and Ulrike Grossner and Gabriel Ferro},
  year = {2024},
  doi = {10.4028/p-auz0oi},
  url = {https://arxiv.org/abs/2410.07680},
  note = {Source identifier: 2410.07680}
}