TY  - RPRT
TI  - Surface Structuring of Patterned 4H-SiC Surfaces Using a SiC/Si/SiC Sandwich Approach
AU  - Yann Jousseaume
AU  - Piyush Kumar
AU  - Marianne Etzelmüller Bathen
AU  - François Cauwet
AU  - Ulrike Grossner
AU  - Gabriel Ferro
PY  - 2024
DO  - 10.4028/p-auz0oi
UR  - https://arxiv.org/abs/2410.07680
ID  - 2410.07680
ER  -