@misc{indiciae6fa9715bdfb3,
  title = {Contact-interference Hybrid lithography: Toward Scalable Fabrication of cross-scale periodic micro structure and demonstration on infrared micro polarizer array},
  author = {Tianshi Lu and Fuyuan Deng and Yufeng Wei and Zhipeng Zeng and Xinghui Li},
  year = {2024},
  url = {https://arxiv.org/abs/2410.12573},
  note = {Source identifier: 2410.12573}
}