TY  - RPRT
TI  - Contact-interference Hybrid lithography: Toward Scalable Fabrication of cross-scale periodic micro structure and demonstration on infrared micro polarizer array
AU  - Tianshi Lu
AU  - Fuyuan Deng
AU  - Yufeng Wei
AU  - Zhipeng Zeng
AU  - Xinghui Li
PY  - 2024
UR  - https://arxiv.org/abs/2410.12573
ID  - 2410.12573
ER  -