@misc{indiciae6c8aabb41e09,
  title = {Lossless photon flux sensing methodology for EUV and Soft X-ray metrology systems},
  author = {Sven Weerdenburg and Roland Horsten and Wim Coene},
  year = {2024},
  url = {https://arxiv.org/abs/2410.20479},
  note = {Source identifier: 2410.20479}
}