@misc{indiciae9b8a7115dd6a, title = {Long-term stability and oxidation of ferroelectric AlScN devices: An operando HAXPES study}, author = {Oliver Rehm and Lutz Baumgarten and Roberto Guido and Pia Maria Düring and Andrei Gloskovskii and Christoph Schlueter and Thomas Mikolajick and Uwe Schroeder and Martina Müller}, year = {2024}, doi = {10.1002/pssr.202400307}, url = {https://arxiv.org/abs/2410.21132}, note = {Source identifier: 2410.21132} }