@misc{indiciae8a345840bd15,
  title = {Phase transformation and water adsorption behavior of ALD deposited and annealed Ru and RuO2 films},
  author = {S. S. Nalawade and R. S. Kim and J. Mahl and S. Cherono and I. Chris-Okoro and V. Craciun and J. Yan and E. Crumlin and D. Kumar and S. Aravamudhan},
  year = {2024},
  url = {https://arxiv.org/abs/2410.22666},
  note = {Source identifier: 2410.22666}
}