@misc{indiciae9c9cc36d37fd,
  title = {Hybrid approach to reconstruct nanoscale grating dimensions using scattering and fluorescence with soft X-rays},
  author = {Leonhard M. Lohr and Richard Ciesielski and Vinh-Binh Truong and Victor Soltwisch},
  year = {2024},
  doi = {10.1039/d4nr04580g},
  url = {https://arxiv.org/abs/2410.24048},
  note = {Source identifier: 2410.24048}
}