TY  - RPRT
TI  - Hybrid approach to reconstruct nanoscale grating dimensions using scattering and fluorescence with soft X-rays
AU  - Leonhard M. Lohr
AU  - Richard Ciesielski
AU  - Vinh-Binh Truong
AU  - Victor Soltwisch
PY  - 2024
DO  - 10.1039/d4nr04580g
UR  - https://arxiv.org/abs/2410.24048
ID  - 2410.24048
ER  -