@misc{indiciae5100e39fb947,
  title = {Microwave power and chamber pressure studies for single-crystalline diamond film growth using microwave plasma CVD},
  author = {Truong Thi Hien and Jaesung Park and Cuong Manh Nguyen and Jeong Hyun Shim and Sangwon Oh},
  year = {2025},
  doi = {10.1016/j.vacuum.2025.114818},
  url = {https://arxiv.org/abs/2411.01096},
  note = {Source identifier: 2411.01096}
}