TY  - RPRT
TI  - Microwave power and chamber pressure studies for single-crystalline diamond film growth using microwave plasma CVD
AU  - Truong Thi Hien
AU  - Jaesung Park
AU  - Cuong Manh Nguyen
AU  - Jeong Hyun Shim
AU  - Sangwon Oh
PY  - 2025
DO  - 10.1016/j.vacuum.2025.114818
UR  - https://arxiv.org/abs/2411.01096
ID  - 2411.01096
ER  -