@misc{indiciae2f2d5b65c9b2,
  title = {Fabrication of Ultra-Low-Loss, Dispersion-Engineered Silicon Nitride Photonic Integrated Circuits via Silicon Hardmask Etching},
  author = {Shuai Liu and Yuheng Zhang and Abdulkarim Hariri and Abdur-Raheem Al-Hallak and Zheshen Zhang},
  year = {2024},
  url = {https://arxiv.org/abs/2411.01724},
  note = {Source identifier: 2411.01724}
}