TY  - RPRT
TI  - Fabrication of Ultra-Low-Loss, Dispersion-Engineered Silicon Nitride Photonic Integrated Circuits via Silicon Hardmask Etching
AU  - Shuai Liu
AU  - Yuheng Zhang
AU  - Abdulkarim Hariri
AU  - Abdur-Raheem Al-Hallak
AU  - Zheshen Zhang
PY  - 2024
UR  - https://arxiv.org/abs/2411.01724
ID  - 2411.01724
ER  -