@misc{indiciaefacb5ff539e2,
  title = {Global Alignment Reference Strategy for Laser Interference Lithography Pattern Arrays},
  author = {Xiang Gao and Jingwen Li and Zijian Zhong and Xinghui Li},
  year = {2024},
  url = {https://arxiv.org/abs/2411.01976},
  note = {Source identifier: 2411.01976}
}