TY  - RPRT
TI  - Global Alignment Reference Strategy for Laser Interference Lithography Pattern Arrays
AU  - Xiang Gao
AU  - Jingwen Li
AU  - Zijian Zhong
AU  - Xinghui Li
PY  - 2024
UR  - https://arxiv.org/abs/2411.01976
ID  - 2411.01976
ER  -