@misc{indiciae1c2952ae4937,
  title = {GPU-Accelerated Inverse Lithography Towards High Quality Curvy Mask Generation},
  author = {Haoyu Yang and Haoxing Ren},
  year = {2024},
  url = {https://arxiv.org/abs/2411.07311},
  note = {Source identifier: 2411.07311}
}