@misc{indiciaee16df0d55d8c,
  title = {Electron dynamics and SiO2 etching profile evolution in capacitive Ar/CHF3 discharges driven by sawtooth-tailored voltage waveforms},
  author = {Wan Dong and Liu-Qin Song and Yi-Fan Zhang and Li Wang and Yuan-Hong Song and Julian Schulze},
  year = {2024},
  url = {https://arxiv.org/abs/2411.07839},
  note = {Source identifier: 2411.07839}
}