TY  - RPRT
TI  - Electron dynamics and SiO2 etching profile evolution in capacitive Ar/CHF3 discharges driven by sawtooth-tailored voltage waveforms
AU  - Wan Dong
AU  - Liu-Qin Song
AU  - Yi-Fan Zhang
AU  - Li Wang
AU  - Yuan-Hong Song
AU  - Julian Schulze
PY  - 2024
UR  - https://arxiv.org/abs/2411.07839
ID  - 2411.07839
ER  -