@misc{indiciae3bcae9b2adfa,
  title = {Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach},
  author = {Bingran Wang and Min Sung Kim and Taewoong Yoon and Dasom Lee and Byeong-Sang Kim and Dougyong Sung and John T. Hwang},
  year = {2024},
  url = {https://arxiv.org/abs/2411.08149},
  note = {Source identifier: 2411.08149}
}