TY  - RPRT
TI  - Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach
AU  - Bingran Wang
AU  - Min Sung Kim
AU  - Taewoong Yoon
AU  - Dasom Lee
AU  - Byeong-Sang Kim
AU  - Dougyong Sung
AU  - John T. Hwang
PY  - 2024
UR  - https://arxiv.org/abs/2411.08149
ID  - 2411.08149
ER  -