@misc{indiciae7cea88e734ef, title = {Design and Process Analysis of a Split-Gate Trench Power MOSFET with Bottom-Trench Hk-Pillar Superjunction for Enhanced Performance}, author = {Yunteng Jiang and Zhentao Xiao and Zonghao Zhang and Juncheng Zhang and Chenxing Wang and Wenjun Li and Haimeng Huang and Aynul Islam and Hongqiang Yang}, year = {2024}, url = {https://arxiv.org/abs/2411.09304}, note = {Source identifier: 2411.09304} }