TY - RPRT TI - Design and Process Analysis of a Split-Gate Trench Power MOSFET with Bottom-Trench Hk-Pillar Superjunction for Enhanced Performance AU - Yunteng Jiang AU - Zhentao Xiao AU - Zonghao Zhang AU - Juncheng Zhang AU - Chenxing Wang AU - Wenjun Li AU - Haimeng Huang AU - Aynul Islam AU - Hongqiang Yang PY - 2024 UR - https://arxiv.org/abs/2411.09304 ID - 2411.09304 ER -