@misc{indiciae455d700603e9, title = {A Python-Based Approach to Sputter Deposition Simulations in Combinatorial Materials Science}, author = {Felix Thelen and Rico Zehl and Jan Lukas Bürgel and Diederik Depla and Alfred Ludwig}, year = {2024}, url = {https://arxiv.org/abs/2411.14413}, note = {Source identifier: 2411.14413} }