TY  - RPRT
TI  - A Python-Based Approach to Sputter Deposition Simulations in Combinatorial Materials Science
AU  - Felix Thelen
AU  - Rico Zehl
AU  - Jan Lukas Bürgel
AU  - Diederik Depla
AU  - Alfred Ludwig
PY  - 2024
UR  - https://arxiv.org/abs/2411.14413
ID  - 2411.14413
ER  -