@misc{indiciaebc63fba45333, title = {SEMU-Net: A Segmentation-based Corrector for Fabrication Process Variations of Nanophotonics with Microscopic Images}, author = {Rambod Azimi and Yijian Kong and Dusan Gostimirovic and James J. Clark and Odile Liboiron-Ladouceur}, year = {2024}, url = {https://arxiv.org/abs/2411.16973}, note = {Source identifier: 2411.16973} }