TY  - RPRT
TI  - SEMU-Net: A Segmentation-based Corrector for Fabrication Process Variations of Nanophotonics with Microscopic Images
AU  - Rambod Azimi
AU  - Yijian Kong
AU  - Dusan Gostimirovic
AU  - James J. Clark
AU  - Odile Liboiron-Ladouceur
PY  - 2024
UR  - https://arxiv.org/abs/2411.16973
ID  - 2411.16973
ER  -