@misc{indiciae29f185738cad,
  title = {Improved Leakage Currents and Polarity Control through Oxygen Incorporation in Ferroelectric Al0.73Sc0.27N Thin Films},
  author = {Md Redwanul Islam and Niklas Wolff and Georg Schönweger and Tom-Niklas Kreutzer and Margaret Brown and Maike Gremmel and Patrik Straňák and Lutz Kirste and Geoff L. Brennecka and Simon Fichtner and Lorenz Kienle},
  year = {2024},
  url = {https://arxiv.org/abs/2411.17360},
  note = {Source identifier: 2411.17360}
}