@misc{indiciae12d484ccc71b,
  title = {Multi-focal Picosecond laser vertical slicing of 6 inch 4H-SiC ingot},
  author = {Jiabao Du and Shusen Zhao and Xiaoyu Lu and Lu Jiang and Shifei Han and Xinyao Li and Xuechun Lin},
  year = {2024},
  url = {https://arxiv.org/abs/2411.18093},
  note = {Source identifier: 2411.18093}
}