@misc{indiciae258f39cadefa, title = {A Machine Learning Approach Capturing Hidden Parameters in Autonomous Thin-Film Deposition}, author = {Yuanlong Zheng and Connor Blake and Layla Mravac and Fengxue Zhang and Yuxin Chen and Shuolong Yang}, year = {2024}, doi = {10.1038/s41524-025-01805-0.}, url = {https://arxiv.org/abs/2411.18721}, note = {Source identifier: 2411.18721} }