@misc{indiciaeb2ca796497b1, title = {Stoichiometry and Thickness of Epitaxial SrTiO\$\_\{3\}\$ on Silicon (001): an Investigation of Physical, Optical and Electrical Properties}, author = {Andries Boelen and Marina Baryshnikova and Anja Ulrich and Kamal Brahim and Joris Van de Vondel and Christian Haffner and Clement Merckling}, year = {2025}, doi = {10.1021/acs.cgd.5c00103}, url = {https://arxiv.org/abs/2412.07395}, note = {Source identifier: 2412.07395} }