@misc{indiciae778e81d463c5, title = {Contact Resistance Optimization in MoS\$\{\_2\}\$ Field-Effect Transistors through Reverse Sputtering-Induced Structural Modifications}, author = {Yuan Fa and Agata Piacentini and Bart Macco and Holger Kalisch and Michael Heuken and Andrei Vescan and Zhenxing Wang and Max C. Lemme}, year = {2024}, doi = {10.1021/acsami.4c21596}, url = {https://arxiv.org/abs/2412.08663}, note = {Source identifier: 2412.08663} }