TY  - RPRT
TI  - Contact Resistance Optimization in MoS${_2}$ Field-Effect Transistors through Reverse Sputtering-Induced Structural Modifications
AU  - Yuan Fa
AU  - Agata Piacentini
AU  - Bart Macco
AU  - Holger Kalisch
AU  - Michael Heuken
AU  - Andrei Vescan
AU  - Zhenxing Wang
AU  - Max C. Lemme
PY  - 2024
DO  - 10.1021/acsami.4c21596
UR  - https://arxiv.org/abs/2412.08663
ID  - 2412.08663
ER  -