@misc{indiciaed34c76b33017,
  title = {Hybrid Model-Data Fault Diagnosis for Wafer Handler Robots: Tilt and Broken Belt Cases},
  author = {Tim van Esch and Farhad Ghanipoor and Carlos Murguia and Nathan van de Wouw},
  year = {2024},
  url = {https://arxiv.org/abs/2412.09114},
  note = {Source identifier: 2412.09114}
}