@misc{indiciae2ca927a02b13,
  title = {Benchmarking large language models for materials synthesis: the case of atomic layer deposition},
  author = {Angel Yanguas-Gil and Matthew T. Dearing and Jeffrey W. Elam and Jessica C. Jones and Sungjoon Kim and Adnan Mohammad and Chi Thang Nguyen and Bratin Sengupta},
  year = {2024},
  doi = {10.1116/6.0004319},
  url = {https://arxiv.org/abs/2412.10477},
  note = {Source identifier: 2412.10477}
}