TY  - RPRT
TI  - Benchmarking large language models for materials synthesis: the case of atomic layer deposition
AU  - Angel Yanguas-Gil
AU  - Matthew T. Dearing
AU  - Jeffrey W. Elam
AU  - Jessica C. Jones
AU  - Sungjoon Kim
AU  - Adnan Mohammad
AU  - Chi Thang Nguyen
AU  - Bratin Sengupta
PY  - 2024
DO  - 10.1116/6.0004319
UR  - https://arxiv.org/abs/2412.10477
ID  - 2412.10477
ER  -