@misc{indiciae2f5d19c92d1c,
  title = {Towards Improved Polarization Uniformity in Ferroelectric Hf\$\_\{0.5\}\$Zr\$\_\{0.5\}\$O\$\_2\$ Devices within Back End of Line Thermal Budget for Memory and Neuromorphic Applications},
  author = {Padma Srivari and Ella Paasio and Xinye Li and Sayani Majumdar},
  year = {2024},
  url = {https://arxiv.org/abs/2412.11288},
  note = {Source identifier: 2412.11288}
}