TY  - RPRT
TI  - Towards Improved Polarization Uniformity in Ferroelectric Hf$_{0.5}$Zr$_{0.5}$O$_2$ Devices within Back End of Line Thermal Budget for Memory and Neuromorphic Applications
AU  - Padma Srivari
AU  - Ella Paasio
AU  - Xinye Li
AU  - Sayani Majumdar
PY  - 2024
UR  - https://arxiv.org/abs/2412.11288
ID  - 2412.11288
ER  -