@misc{indiciae5a6cc0120a9d, title = {Fast inverse lithography based on a model-driven block stacking convolutional neural network}, author = {Ruixiang Chen and Yang Zhao and Haoqin Li and Rui Chen}, year = {2024}, url = {https://arxiv.org/abs/2412.14599}, note = {Source identifier: 2412.14599} }