TY  - RPRT
TI  - Fast inverse lithography based on a model-driven block stacking convolutional neural network
AU  - Ruixiang Chen
AU  - Yang Zhao
AU  - Haoqin Li
AU  - Rui Chen
PY  - 2024
UR  - https://arxiv.org/abs/2412.14599
ID  - 2412.14599
ER  -