@misc{indiciae06066ec23bf0, title = {A detailed examination of polysilicon resistivity incorporating the grain size distribution}, author = {Mikael Santonen and Antti Lahti and Zahra Jahanshah Rad and Mikko Miettinen and Masoud Ebrahimzadeh and Juha-Pekka Lehtiƶ and Enni Snellman and Pekka Laukkanen and Marko Punkkinen and Kalevi Kokko and Katja Parkkinen and Markus Eklund}, year = {2024}, doi = {10.1109/ted.2025.3530865}, url = {https://arxiv.org/abs/2412.15784}, note = {Source identifier: 2412.15784} }