@misc{indiciae42ebe98f5a1c,
  title = {Ferroelectric AlScN thin films with enhanced polarization and low leakage enabled by high-power impulse magnetron sputtering},
  author = {Federica Messi and Jyotish Patidar and Nathan Rodkey and Christoph W. Dräyer and Morgan Trassin and Sebastian Siol},
  year = {2025},
  url = {https://arxiv.org/abs/2501.02101},
  note = {Source identifier: 2501.02101}
}