TY  - RPRT
TI  - Ferroelectric AlScN thin films with enhanced polarization and low leakage enabled by high-power impulse magnetron sputtering
AU  - Federica Messi
AU  - Jyotish Patidar
AU  - Nathan Rodkey
AU  - Christoph W. Dräyer
AU  - Morgan Trassin
AU  - Sebastian Siol
PY  - 2025
UR  - https://arxiv.org/abs/2501.02101
ID  - 2501.02101
ER  -