@misc{indiciaeb91648eceed7,
  title = {Federated Knowledge Distillation for Multi-Model Architectures Lithography Hotspot Detection},
  author = {Yuqi Li and Xingyou Lin and Yanli Li and Kai Zhang and Chuanguang Yang and Zhongliang Guo and Jianping Gou and Tingwen Huang and Yingli Tian},
  year = {2026},
  url = {https://arxiv.org/abs/2501.04066},
  note = {Source identifier: 2501.04066}
}