@misc{indiciae5ab226e5e1aa,
  title = {X-ray diffraction characterization of suspended structures for MEMS applications},
  author = {P. Goudeau and N. Tamura and B. Lavelle and S. Rigo and T. Masri and A. Bosseboeuf and T. Sarnet and J. -A. Petit and J. -M. Desmarres},
  year = {2025},
  url = {https://arxiv.org/abs/2501.10424},
  note = {Source identifier: 2501.10424}
}